Comparison of transition metal nitride coatings produced using two plasma-based deposition techniques

Summary form only given, as follows. Surface coatings of transition metal nitrides have been successfully used in industry to extend the useful life of soft materials while retaining bulk properties. In this study, a comparison of transition metal nitride coatings produced by two plasma-based methods: Physical Vapor Deposition [PVD] and Ion-Beam Enhanced Deposition using Plasma Source Ion Implantation [PSII-IBED] will be performed. Titanium nitride, chromium nitride, and tantalum nitride have been deposited on substrates of aluminum and copper using the above two processes. The tests in this study will focus on the tribological properties of the coatings.