Twisting sliding mode control of an electrostatic MEMS micromirror for a laser scanning system

This paper demonstrates the design and implementation of a second order twisting control algorithm with PID sliding surface for a MEMS micromirror. A laser scanning system with the closed-loop controlled MEMS micromirror is developed and obtains 2D images. Transient response and pointing performance are essential for the optical communications applications, for instance, M EM S optical switches. To verify the effectiveness of the proposed scheme, the experiments of set-point regulation are performed. Compared with traditional sliding mode control, the proposed scheme is able to improve the pointing accuracy with less chattering phenomenon. A micromirror-based laser scanning system is developed, the experimental results confirm that the proposed scheme is able to reduce the distortion of the scan trajectory and improve the image quality.