Microfabrication Process and Characteristic Testing of a MEMS-Based Preconcentrator

Author

Aebersold, Julia ; Martin, Michael ; Roussel, Thomas ; Keynton, Robert ; Walsh, Kevin

Author_Institution

Electr. & Comput. Eng., Univ. of Louisville, Louisville, KY

fYear

2008

fDate

13-16 July 2008

Firstpage

61

Lastpage

63

Abstract

Due to terroristic activities it has become of significant importance to accurately detect vapor or trace particles of explosive materials. This task is difficult due to the limited number of particles available to be gathered for analysis. In order to combat this problem a preconcentrator has been developed to increase collection efficiency and the signal to noise ratio. Described is the fabrication process and characteristic testing prior to use with a portable ion mobility spectrometer (IMS).

Keywords

micromechanical devices; spectrometers; MEMS-based preconcentrator; characteristic testing; explosive detection; microfabrication process; portable ion mobility spectrometer; signal to noise ratio; trace particles; Aluminum; Biomembranes; Explosives; Fabrication; Materials testing; Platinum; Polyimides; Signal to noise ratio; Sputter etching; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

University/Government/Industry Micro/Nano Symposium, 2008. UGIM 2008. 17th Biennial

Conference_Location

Louisville, KY

Print_ISBN

978-1-4244-2484-9

Electronic_ISBN

978-1-4244-2485-6

Type

conf

DOI

10.1109/UGIM.2008.23

Filename

4573201