Preparation and characterization of Bi-perovskite oxide films for piezo applications

Author

Yasui, Shintaro ; Naganuma, Hiroshi ; Okamura, Soichiro ; Iijima, Takashi ; Nishida, Ken ; Katoda, Takashi ; Uchida, Hiroshi ; Koda, Seiichiro ; Funakubo, Hiroshi

Author_Institution

Tokyo Inst. of Technol., Yokohama

fYear

2007

fDate

27-31 May 2007

Firstpage

102

Lastpage

103

Abstract

Thin films of BiFeO₃0-BiScO₃ (BFO-BSO) solid-solution were fabricated for improving electrical resistivity of BiFeO₃-based films by replacing electrically-unstable Fe³⁺ for stable Sc³⁺. The films with chemical composition of Bi(Fe_1-x, Sc_x)O₃ were fabricated on (111)Pt/TiO₂/SiO₂/(100)Si by chemical solution deposition technique. Single phase of perovskite was obtained in the range of x = 0-0.3, where selective replacement of Fe³⁺ and Sc³⁺ was confirmed by Raman measurement. The leakage current density of BFO-BSO film was reduced by increasing x. Well-saturated polarization -electric field hysteresis loop was obtained for BFO-BSO film with x = 0.15.

Keywords

Raman spectra; bismuth compounds; crystal structure; dielectric hysteresis; dielectric polarisation; dielectric thin films; electrical resistivity; leakage currents; liquid phase epitaxial growth; BiFeO₃-BiScO₃; Pt-TiO₂-SiO₂-Si; Raman measurement; Si; chemical composition; chemical solution deposition technique; crystal structure; electric field hysteresis loop; electrical resistivity; leakage current density; perovskite oxide films; piezo applications; polarization; Chemical technology; Electronics industry; Ferroelectric films; Ferroelectric materials; Leakage current; Material storage; Materials science and technology; Piezoelectric films; Textile industry; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on

Conference_Location

Nara

ISSN

1099-4734

Print_ISBN

978-1-4244-1334-8

Electronic_ISBN

1099-4734

Type

conf

DOI

10.1109/ISAF.2007.4393180

Filename

4393180