• DocumentCode
    2275515
  • Title

    Physical and electrical characteristics of SBT ferroelectric thin films with different thickness and varied stresses during annealing

  • Author

    Hsu, F.Y. ; Leu, C.C. ; Hu, C.T.

  • Author_Institution
    Nat. Tsing Hua Univ., Hsinchu
  • fYear
    2007
  • fDate
    27-31 May 2007
  • Firstpage
    112
  • Lastpage
    114
  • Abstract
    In present study, we applied either a tensile or compressive mechanical stress during annealing on SrBi2Ta2O9 (SBT) ferroelectric thin films with different thickness to investigate the effects of both thickness and stress on the physical and electric properties. The application of external stress during annealing led to the variety of both microstructures and constituted phases (ratio of perovskite vs, pyrochlore) in the films. These variations of structures became more significant in the relatively thinner films. Since the electrical properties of ferroelectrics were strongly depended on their microstructure, domain structure, and constituted phases, our ferroelectric samples demonstrated the distinct ferroelectric behaviors with the condition of various stressing and thickness.
  • Keywords
    annealing; bismuth compounds; crystal microstructure; electric domains; ferroelectric materials; ferroelectric thin films; strontium compounds; SBT ferroelectric thin films; SrBi2Ta2O9; annealing; compressive mechanical stress; domain structure; electrical properties; microstructures; perovskite-pyrochlore ratio; physical properties; Annealing; Compressive stress; Electric variables; Ferroelectric films; Ferroelectric materials; Microstructure; Residual stresses; Temperature; Tensile stress; Transistors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Applications of Ferroelectrics, 2007. ISAF 2007. Sixteenth IEEE International Symposium on
  • Conference_Location
    Nara
  • ISSN
    1099-4734
  • Print_ISBN
    978-1-4244-1334-8
  • Electronic_ISBN
    1099-4734
  • Type

    conf

  • DOI
    10.1109/ISAF.2007.4393185
  • Filename
    4393185