• DocumentCode
    2275633
  • Title

    Development of quantum hall array resistance standards at NMIJ

  • Author

    Oe, T. ; Kaneko, N. ; Urano, C. ; Itatani, T. ; Ishii, H. ; Kiryu, S.

  • Author_Institution
    Nat. Metrol. Inst. of Japan, Nat. Inst. of Adv. Ind. Sci. & Technol., Tsukuba
  • fYear
    2008
  • fDate
    8-13 June 2008
  • Firstpage
    20
  • Lastpage
    21
  • Abstract
    An experimental device of quantum Hall array resistance standards with a nominal value close to 10 kOmega on the i = 2 plateau and a parallel array of two Hall bars have been developed. The latter array clearly shows quantized Hall resistance of a quarter value of the von Klitzing constant, RK on the i = 2 plateau.
  • Keywords
    Hall effect devices; magnetic variables measurement; magnetoresistance; measurement standards; quantum Hall effect; Hall bars; NMIJ primary standard; QHR device; quantized Hall resistance measurement; quantum Hall array resistance standards; von Klitzing constant; Bars; Calibration; Dry etching; Fabrication; Gallium arsenide; Gold; Insulation; Metrology; Polyimides; Standards development;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Precision Electromagnetic Measurements Digest, 2008. CPEM 2008. Conference on
  • Conference_Location
    Broomfield, CO
  • Print_ISBN
    978-1-4244-2399-6
  • Electronic_ISBN
    978-1-4244-2400-9
  • Type

    conf

  • DOI
    10.1109/CPEM.2008.4574632
  • Filename
    4574632