DocumentCode
2275633
Title
Development of quantum hall array resistance standards at NMIJ
Author
Oe, T. ; Kaneko, N. ; Urano, C. ; Itatani, T. ; Ishii, H. ; Kiryu, S.
Author_Institution
Nat. Metrol. Inst. of Japan, Nat. Inst. of Adv. Ind. Sci. & Technol., Tsukuba
fYear
2008
fDate
8-13 June 2008
Firstpage
20
Lastpage
21
Abstract
An experimental device of quantum Hall array resistance standards with a nominal value close to 10 kOmega on the i = 2 plateau and a parallel array of two Hall bars have been developed. The latter array clearly shows quantized Hall resistance of a quarter value of the von Klitzing constant, RK on the i = 2 plateau.
Keywords
Hall effect devices; magnetic variables measurement; magnetoresistance; measurement standards; quantum Hall effect; Hall bars; NMIJ primary standard; QHR device; quantized Hall resistance measurement; quantum Hall array resistance standards; von Klitzing constant; Bars; Calibration; Dry etching; Fabrication; Gallium arsenide; Gold; Insulation; Metrology; Polyimides; Standards development;
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements Digest, 2008. CPEM 2008. Conference on
Conference_Location
Broomfield, CO
Print_ISBN
978-1-4244-2399-6
Electronic_ISBN
978-1-4244-2400-9
Type
conf
DOI
10.1109/CPEM.2008.4574632
Filename
4574632
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