• DocumentCode
    2275735
  • Title

    Analytic modeling of AC response to FET-level elements for CLY optimization

  • Author

    Karve, Gauri ; Logan, Ron ; Greene, Brian ; Winslow, Jonathan

  • Author_Institution
    IBM Syst. & Technol., Hopewell Junction, NY, USA
  • fYear
    2012
  • fDate
    15-17 May 2012
  • Firstpage
    11
  • Lastpage
    15
  • Abstract
    Minimizing circuit AC delay variations while maintaining power/performance is key for achieving high yielding products. The present work discusses an analytic model based approach for aligning the fundamental-FET electrical control and circuit-speed variability applied towards product screening. Such a model is proven to be effective in a manufacturing environment for predicting delay variation, and identifying the limiting process issues that drive our capability to achieve success in maximizing yield. The ability to understand circuit delay as it relates back to basic device measurements provides an ability to improve standard work in semiconductor manufacturing and realize continuous productivity enhancement.
  • Keywords
    field effect transistors; semiconductor device models; AC response; CLY optimization; FET-level elements; analytic modeling; circuit AC delay variations; circuit-speed variability; device measurements; fundamental-FET electrical control; high yielding products; productivity enhancement; semiconductor manufacturing; Capacitance; Delay; FETs; Hardware; Integrated circuit modeling; Mathematical model; Predictive models; Ring oscillator delay variability; cmos process variability; device centering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference (ASMC), 2012 23rd Annual SEMI
  • Conference_Location
    Saratoga Springs, NY
  • ISSN
    1078-8743
  • Print_ISBN
    978-1-4673-0350-7
  • Type

    conf

  • DOI
    10.1109/ASMC.2012.6212860
  • Filename
    6212860