Rules of automation for 200mm semiconductor manufacturing environment

Author

Heinrich, Harald ; Deutschländer, Arthur

Author_Institution

Factory Lo.gistics & Autom., Infineon Technol. Dresden GmbH, Dresden, Germany

fYear

2012

fDate

15-17 May 2012

Firstpage

51

Lastpage

56

Abstract

This article focuses on Infineon´s consequent way to retain their European facilities by designing and building a high profitable eight inch manufacturing environment. The challenges for automation in such an environment are discussed and practical experiences are presented. Based on more than 7 years of automation experiences, we developed summarized rules of automation. We will show the advantages and benefits of our automation strategy for high volume/high mix eight inch facilities.

Keywords

factory automation; production facilities; semiconductor device manufacture; European facilities; Infineon; automation rule; automation strategy; semiconductor manufacturing environment; size 200 mm; size 8 inch; Automation; Manufacturing; Materials; Production; Robots; Software; Standards; automated lot handling; automation strategy; layout concepts; manufacturing performance; reduction of cycle time and variability; robotics; standardization of processes;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference (ASMC), 2012 23rd Annual SEMI

Conference_Location

Saratoga Springs, NY

ISSN

1078-8743

Print_ISBN

978-1-4673-0350-7

Type

conf

DOI

10.1109/ASMC.2012.6212867

Filename

6212867