1 chip integrated software calibrated CMOS pressure sensor with MCU, A/D convertor, D/A convertor, digital communication port, signal conditioning circuit and temperature sensor

Author

Yoshii, Yoshiharu ; Nakajo, Akira ; Abe, Hiroya ; Nimomiya, K. ; Miyashita, Hitoshi ; Sakurai, Naoko ; Kosuge, Masahiro ; Hao, Simon

Author_Institution

Semicond. Products Div., Nippon Motorola Ltd., Sendai, Japan

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

1485

Abstract

This paper reports the newly developed 1 chip integrated CMOS pressure sensor, its highly manufacturable fabrication process using SOI substrate, its output characteristics calibrated and compensated by software on MCU with excellent absolute accuracy over wide temperature range, and the calibration system to perform calibration process

Keywords

CMOS integrated circuits; calibration; computerised instrumentation; microsensors; piezoresistive devices; pressure sensors; silicon-on-insulator; A/D convertor; CMOS pressure sensor; D/A convertor; MCU; SOI substrate; Si; Si-SiN; accuracy; calibration; compensation; die fabrication; digital communication port; integrated software; output characteristics; signal conditioning circuit; temperature sensor; CMOS process; Calibration; Fabrication; Manufacturing processes; Pulp manufacturing; Sensor phenomena and characterization; Sensor systems; Software performance; Temperature distribution; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635746

Filename

635746