DocumentCode
2282945
Title
SOME SELECTED RESEARCH ITEMS OF THE MICROMECHANICS DEPARTMENT AT MESA
Author
Elwenspoek, M.
fYear
1994
fDate
2-4 Oct 1994
Firstpage
9
Keywords
Actuators; Capacitive sensors; Chemical technology; Fluid flow; Force measurement; Integrated circuit technology; Micromachining; Optical sensors; Resonance; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Machine and Human Science, 1994. Proceedings., 1994 5th International Symposium on
Print_ISBN
0-7803-2095-6
Type
conf
DOI
10.1109/ISMMHS.1994.512894
Filename
512894
Link To Document