Electrostatic micro actuator fabricated by micro stereo lithography (IH process)

New type of real three dimensional micro fabrication using micro stereo lithography and electroplating named IH (integrated harden) process was previously proposed and demonstrated by the authors (1993). This process is applicable for both polymer and metal micro structure. In the first part of this paper, new type of micro integrated fluid system (MIFS) whose concept is hybrid system combined with conventional silicon process and new IH process. Three dimensional MIFS is prototyped successfully. Secondly, special conductive UV solidified polymer is developed by the authors and electrostatic micro actuator made of it by using IH process