• DocumentCode
    2302180
  • Title

    Optomechanical transduction of a cantilever probe using a high-Q Si microdisk cavity

  • Author

    Srinivasan, Kartik ; Miao, Houxun ; Rakher, Matthew T. ; Davanço, Marcelo ; Aksyuk, Vladimir

  • Author_Institution
    Center for Nanoscale Sci. & Technol., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
  • fYear
    2010
  • fDate
    7-11 Nov. 2010
  • Firstpage
    195
  • Lastpage
    196
  • Abstract
    Optomechanical transduction of a silicon cantilever probe intended for atomic force microscopy applications is achieved through gradient force coupling to a high quality factor microdisk cavity, with an estimated displacement sensitivity of ≈3×10-15 m/√(Hz).
  • Keywords
    Q-factor; atomic force microscopy; cantilevers; micro-optomechanical devices; microcavities; optical couplers; semiconductor devices; silicon; transducers; Si; atomic force microscopy; displacement sensitivity; gradient force coupling; high quality factor microdisk cavity; optomechanical transduction; silicon cantilever probe;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IEEE Photonics Society, 2010 23rd Annual Meeting of the
  • Conference_Location
    Denver, CO
  • ISSN
    -
  • Print_ISBN
    978-1-4244-5368-9
  • Electronic_ISBN
    -
  • Type

    conf

  • DOI
    10.1109/PHOTONICS.2010.5698825
  • Filename
    5698825
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2302180