DocumentCode
2303212
Title
Modeling Magnetic Bucket Confinement (415) 121
Author
Stewart, R.A. ; Troyanovsky, B. ; Lieberman, M.A.
Author_Institution
University of California
fYear
1991
fDate
3-5 June 1991
Firstpage
121
Lastpage
121
Keywords
Etching; Inductors; Magnetic confinement; Magnetic resonance; Plasma applications; Plasma confinement; Plasma density; Plasma materials processing; Plasma measurements; Plasma sources;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
Conference_Location
Williamsburg, VA, USA
Print_ISBN
0-7803-0147-1
Type
conf
DOI
10.1109/PLASMA.1991.695542
Filename
695542
Link To Document