DocumentCode
2303372
Title
Wafer-level inspection system for the automated testing of comb drive based MEMS sensors and actuators
Author
Beyeler, F. ; Muntwyler, S. ; Nelson, B.J.
Author_Institution
ETH Zurich, Zurich, Switzerland
fYear
2010
fDate
21-24 Aug. 2010
Firstpage
698
Lastpage
703
Abstract
This work describes the design and experimental evaluation of a system for the non-contact testing of MEMS transducers on wafer level. The measurement principle is based on the optical detection of vibrating MEMS structures at their specific natural frequency. The working principle is demonstrated by testing a wafer with microfabricated microgrippers. Defective microgrippers are automatically identified.
Keywords
automatic testing; grippers; inspection; microactuators; micromanipulators; microsensors; MEMS actuators; MEMS sensors; MEMS transducers; automated testing; comb drive; microfabricated microgripper; natural frequency; noncontact testing; wafer level inspection system; Damping; Grippers; Inspection; Micromechanical devices; Resonant frequency; Testing; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Automation Science and Engineering (CASE), 2010 IEEE Conference on
Conference_Location
Toronto, ON
Print_ISBN
978-1-4244-5447-1
Type
conf
DOI
10.1109/COASE.2010.5584102
Filename
5584102
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