DocumentCode
2303774
Title
An Atomic Physics Model In a particle-in-cell code for stimulating plasma processing
Author
Rognlien, T.D. ; Hiskes, J.R. ; Cohen, R.H. ; Lieberman, M.A. ; Vahedi, V. ; Birdsall, C.K.
Author_Institution
Lawrence Livermore National Laboratory
fYear
1991
fDate
3-5 June 1991
Firstpage
122
Lastpage
122
Keywords
Analytical models; Atmospheric modeling; Atomic layer deposition; Physics; Plasma accelerators; Plasma materials processing; Plasma measurements; Plasma simulation; Plasma transport processes; Radio frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1991. IEEE Conference Record - Abstracts., 1991 IEEE International Conference on
Conference_Location
Williamsburg, VA, USA
Print_ISBN
0-7803-0147-1
Type
conf
DOI
10.1109/PLASMA.1991.695545
Filename
695545
Link To Document