High-efficiency matching network for RF-driven ion sources

Author

Staples, J. ; Schenkel, T.

Author_Institution

LBNL, Berkeley, CA, USA

Volume

3

fYear

2001

fDate

2001

Firstpage

2108

Abstract

RF-driven ion sources used at LBNL connect a 2 MHz transmitter to an antenna in the plasma generator through an impedance matching network. Previous networks are of low efficiency and require a high-power RF transmitter to excite the plasma. A new network topology provides significantly higher efficiency and matches very low-inductance antennas, with a geometrically preferred form factor. A dual-frequency network option allows a low-level 13.56 MHz transmitter to pre-excite the plasma, eliminating the need for other ignition devices such as a filament or laser, simplifying source construction. Experimental results will be presented

Keywords

accelerator RF systems; antennas in plasma; impedance matching; ion sources; network topology; plasma production; 13.56 MHz; 2 MHz; LBNL; RF-driven ion sources; dual-frequency network; high-efficiency matching network; ignition devices; impedance matching network; inductance antennas; network topology; plasma generator; Ignition; Impedance matching; Ion sources; Laser excitation; Network topology; Plasma devices; Plasma sources; Radio frequency; Transmitters; Transmitting antennas;

fLanguage

English

Publisher

ieee

Conference_Titel

Particle Accelerator Conference, 2001. PAC 2001. Proceedings of the 2001

Conference_Location

Chicago, IL

Print_ISBN

0-7803-7191-7

Type

conf

DOI

10.1109/PAC.2001.987292

Filename

987292