• DocumentCode
    2311382
  • Title

    Sputtered CuInSe2 polycrystalline and epitaxial films and devices

  • Author

    Yang, L. Chung ; Berry, G. ; Chou, L.J. ; Kenshole, G. ; Rockett, A. ; Mullan, C.A. ; Kiely, C.J.

  • Author_Institution
    Dept. of Mater. Sci. & Eng., Illinois Univ., Urbana, IL, USA
  • fYear
    1993
  • fDate
    10-14 May 1993
  • Firstpage
    505
  • Lastpage
    509
  • Abstract
    Recent solar cell fabrication results based on a scalable hybrid sputtering and evaporation deposition process are described. A method for controlling adhesion problems, which are a major cause of poor device performance is presented based on a two-phase back contact substrate metallization; and results of transmission electron microscopy analyses of epitaxial CuInSe2 are described. Polycrystalline CuInSe2 was deposited on Mo or Cu-Mo coated glass. Single crystal CuInSe2 was grown on GaAs substrates. The use of Cu-Mo two phase back contacts significantly improved adhesion of our CuInSe2 films to the substrates. The best heterojunction solar cell produced to date on Cu-Mo has an efficiency of 10.0%. Cell performance uniformity was also improved relative to results on pure Mo. Single crystal CuInSe2 grown on GaAs (111)A substrates showed very rough surface morphologies. Films on GaAs (111)B were smooth with occasional triangular pyramidal islands. The most stable faces of CuInSe 2 are concluded to be the Se-terminated (112) planes
  • Keywords
    copper compounds; crystal morphology; epitaxial growth; indium compounds; metallisation; p-n heterojunctions; semiconductor epitaxial layers; solar cells; sputter deposition; sputtered coatings; substrates; ternary semiconductors; transmission electron microscope examination of materials; Cu-Mo coated glass; CuInSe2; CuInSe2 epitaxial films; GaAs substrates; Mo coated glass; adhesion problems control; cell performance uniformity; evaporation deposition; heterojunction solar cell; rough surface morphologies; sputtered CuInSe2 polycrystalline devices; transmission electron microscopy; triangular pyramidal islands; two-phase back contact substrate metallization; Adhesives; Fabrication; Gallium arsenide; Glass; Metallization; Performance analysis; Photovoltaic cells; Sputtering; Substrates; Transmission electron microscopy;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photovoltaic Specialists Conference, 1993., Conference Record of the Twenty Third IEEE
  • Conference_Location
    Louisville, KY
  • Print_ISBN
    0-7803-1220-1
  • Type

    conf

  • DOI
    10.1109/PVSC.1993.347129
  • Filename
    347129