SOI CMOS compatible low-power microheater optimization and fabrication for smart gas sensor implementations

Author

Laconte, J. ; Dupont, C. ; Flandre, D. ; Raskin, J.P.

Author_Institution

Res. Center in Micro & Nanoscopic Electron. Devices & Mater. (CeRMIN), Univ. Catholique de Louvain, Louvain-la-Neuve, Belgium

Volume

2

fYear

2002

fDate

2002

Firstpage

1395

Abstract

In this paper, an original design of a polysilicon loop-shaped microheater on a thin stacked dielectric membrane is presented. This design ensures high thermal uniformity and insulation (20.000°C/W) and very low power consumption (20 mW for heating at 400°C). Moreover, the use of completely CMOS compatible TMAH-based bulk-micromachining techniques allows an easy smart gas sensor integration in SOI-CMOS technology.

Keywords

CMOS integrated circuits; elemental semiconductors; gas sensors; intelligent sensors; low-power electronics; micromachining; microsensors; silicon; silicon-on-insulator; 20 mW; 400 degC; SOI CMOS compatible device; Si; TMAH-based bulk-micromachining; low-power microheater optimization; polysilicon loop-shaped microheater; power consumption; smart gas sensor; tetramethyl ammonium hydroxide; thermal uniformity; thin stacked dielectric membrane; Aluminum; Biomembranes; Dielectric materials; Dielectric substrates; Electronic packaging thermal management; Fabrication; Gas detectors; Laboratories; Residual stresses; Silicon on insulator technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2002. Proceedings of IEEE

Print_ISBN

0-7803-7454-1

Type

conf

DOI

10.1109/ICSENS.2002.1037325

Filename

1037325