• DocumentCode
    2315355
  • Title

    Electron-beam induced current measurements of diffusion length in Si doped MOCVD grown GaN

  • Author

    Wee, D. ; Parish, G. ; Nener, B.D.

  • Author_Institution
    Sch. of Electr., Electron. & Comput. Eng., Univ. of Western Australia, Crawley, WA, Australia
  • fYear
    2010
  • fDate
    12-15 Dec. 2010
  • Firstpage
    201
  • Lastpage
    202
  • Abstract
    This paper reports on the electron-beam induced current (EBIC) measurement of minority carrier diffusion length as a function of electron beam acceleration voltage in Si-doped, MOCVD grown, gallium nitride. The measured diffusion length varied from 160nm at 8kV to 220nm at 15kV. Possible reasons for the observed diffusion length dependence on voltage are discussed.
  • Keywords
    EBIC; III-V semiconductors; MOCVD; carrier lifetime; gallium compounds; semiconductor growth; semiconductor thin films; silicon; wide band gap semiconductors; GaN:Si; MOCVD; electron beam acceleration voltage; electron-beam induced current measurements; gallium nitride growth; minority carrier diffusion length; voltage 15 kV; voltage 8 kV; Australia; Current measurement; Gallium nitride; Junctions; Scanning electron microscopy; Semiconductor device measurement; Spontaneous emission;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optoelectronic and Microelectronic Materials and Devices (COMMAD), 2010 Conference on
  • Conference_Location
    Canberra, ACT
  • ISSN
    1097-2137
  • Print_ISBN
    978-1-4244-7334-2
  • Electronic_ISBN
    1097-2137
  • Type

    conf

  • DOI
    10.1109/COMMAD.2010.5699739
  • Filename
    5699739