DocumentCode
2315438
Title
Touch mode capacitive pressure sensor for passive tire monitoring system
Author
Yamamoto, Seiichi ; Nakao, Osamu ; Nishimura, Hideki
Author_Institution
Electron Device Lab., Fujikura Ltd., Tokyo, Japan
Volume
2
fYear
2002
fDate
2002
Firstpage
1582
Abstract
This paper deals with silicon capacitive pressure sensor called "touch-mode" type . A touch mode capacitive pressure sensor that can be used in automobile tire pressure monitoring systems has been developed, and its structure and the fabrication process are described The morphology of the chemically etched diaphragm surface, which has a great influence on fracture toughness of the diaphragm, is focused on.
Keywords
automotive electronics; capacitive sensors; elemental semiconductors; monitoring; pressure sensors; silicon; Si; automobile; capacitive pressure sensor; chemically etched diaphragm surface; fabrication process; fracture toughness; morphology; passive tire monitoring system; tire pressure monitoring systems; Automobiles; Capacitive sensors; Chemical sensors; Fabrication; Monitoring; Sensor phenomena and characterization; Sensor systems; Silicon; Tactile sensors; Tires;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2002. Proceedings of IEEE
Print_ISBN
0-7803-7454-1
Type
conf
DOI
10.1109/ICSENS.2002.1037359
Filename
1037359
Link To Document