Oxygen-sensing characteristics of nanostructured Al-doped ZnO thin films

Author

Shafura, A.K. ; Azhar, N.E.A. ; Saurdi, I. ; Mamat, M.H. ; Uzer, M. ; Rusop, M.

Author_Institution

Fac. of Electr. Eng., Univ. Teknol. MARA (UiTM), Shah Alam, Malaysia

fYear

2014

fDate

19-21 Aug. 2014

Firstpage

446

Lastpage

449

Abstract

Nanostructured Aluminium (Al) doped Zinc Oxide (ZnO) was prepared by sol-gel spin-coating method to fabricate ZnO-based sensors. The oxygen-sensing characteristics were studied by varying the gas flow rate at room temperature. The electrical and structural properties of the films were carried out using current-voltage (IV) measurement, Atomic Force Microscopy (AFM) and Field Emission Scanning Electron Microscopy (FESEM), respectively. The porous nanostructures exhibited good sensitivity, of 73%, in the presence of 50 sccm of O₂ flow rate. From this study, it is known that, ZnO thin film that was observed to have porous structure might enhance gas sensing performance.

Keywords

II-VI semiconductors; aluminium; atomic force microscopy; electric current measurement; field emission electron microscopy; gas sensors; nanofabrication; nanoporous materials; nanosensors; oxygen; scanning electron microscopy; sol-gel processing; spin coating; thin film sensors; voltage measurement; wide band gap semiconductors; zinc compounds; AFM; FESEM; IV measurement; O₂; ZnO:Al; atomic force microscopy; current-voltage measurement; electrical property; field emission scanning electron microscopy; gas sensor; nanofabrication; oxygen-sensing characteristics; porous nanostructured thin film; sol-gel spin-coating method; structural property; temperature 293 K to 298 K; Films; Gas detectors; Sensitivity; Temperature measurement; Zinc oxide; electrical properties; nanostructured zinc oxide; oxygen-sensing; structural properties;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Design (ICED), 2014 2nd International Conference on

Conference_Location

Penang

Type

conf

DOI

10.1109/ICED.2014.7015847

Filename

7015847