DocumentCode
2329874
Title
Measurement Of Adsorbed Moisture Concentration On Various Kinds Of Solid Surfaces By Using Anhydrous Hydrogen Fluoride
Author
Izumi, H. ; Nakagawa, Y. ; Miyoshi, S. ; Ohmi, T.
Author_Institution
Tohoku University
fYear
1994
fDate
21-22 June 1994
Firstpage
211
Lastpage
212
Abstract
We have studied a new measurement method of moisture molecule concentrations adsorbed on solid surface by using Anhydrous Hydrogen Fluoride(AHF) that was able to dissolve adsorbed moisture molecules and dissociate them to ions. After adsorbed moisture molecules on solid surface was dissolved into AHF, the amount of dissolved moisture were then determined by measuring the variation of electric conductivity of AHF. This new measurement method made it possible to measure the moisture molecule concentrations adsorbed on solid surfaces exposed to the atmosphere having high moisture concentrations. It has been found that the amount of adsorbed moisture molecule concentrations on solid surfaces in the atmosphere with 1% at 25 C is 2.5x1016 molecules/cm 2 in equilibrium.
Keywords
Argon; Atmosphere; Atmospheric measurements; Conductivity measurement; Electric variables measurement; Hydrogen; Moisture measurement; Pollution measurement; Solids; Steel;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 1994. Extended Abstracts of ISSM '94. 1994 International Symposium on
Conference_Location
Tokyo, Japan
Type
conf
DOI
10.1109/ISSM.1994.729458
Filename
729458
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