DocumentCode
2341319
Title
Panel discussion on emissivity standards for rtp
Author
Adams, Bruce E.
Author_Institution
Applied Materials
fYear
2003
fDate
23-26 Sept. 2003
Firstpage
153
Lastpage
153
Keywords
Calibration; Electronics industry; Measurement standards; Optical films; Optical filters; Optical sensors; Optical surface waves; Semiconductor device modeling; Surface resistance; Temperature measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Thermal Processing of Semiconductors, 2003. RTP 2003. 11th IEEE International Conference on
Conference_Location
Charleston, SC, USA
Print_ISBN
0-7803-7874-1
Type
conf
DOI
10.1109/RTP.2003.1249138
Filename
1249138
Link To Document