DocumentCode
2342100
Title
Ten years of RTP conference
Author
Lojek, B.
Author_Institution
ATMEL Corporation
fYear
2002
fDate
2002
Firstpage
3
Lastpage
10
Keywords
Electron optics; Heating; Lamps; Manufacturing processes; Optical films; Semiconductor device manufacture; Springs; Temperature measurement; Thermal engineering; Tungsten;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Thermal Processing of Semiconductors, 2002. RTP 2002. 10th IEEE International Conference of
Print_ISBN
0-7803-7465-7
Type
conf
DOI
10.1109/RTP.2002.1039432
Filename
1039432
Link To Document