• DocumentCode
    2345721
  • Title

    Large memory effect in oxidic thin-film transistors with a ferroelectric insulator

  • Author

    Prins, M.W.J. ; Cillessen, J.F.M. ; Giesbers, J.B. ; Grosse-Holz, K.-O.

  • Author_Institution
    Philips Res. Lab., Eindhoven, Netherlands
  • fYear
    1996
  • fDate
    26-26 June 1996
  • Firstpage
    76
  • Lastpage
    77
  • Abstract
    We have fabricated ferroelectric field-effect transistors of oxidic thin films, showing a memory effect with an on/off ratio of more than three orders of magnitude. The devices consist of a n-type SnO/sub 2/ semiconductor channel, a PbZr/sub 0.2/Ti/sub 0.8/O/sub 3/ layer as a ferroelectric insulator, and conducting SrRuO/sub 3/ as the gate electrode. The results demonstrate for the first time that an all-thin-film ferroelectric transistor-where the semiconductor as well as the ferroelectric insulator are deposited as thin films-can exhibit a memory effect of many orders of magnitude.
  • Keywords
    ferroelectric storage; ferroelectric thin films; insulated gate field effect transistors; semiconductor storage; thin film transistors; SnO/sub 2/-PbZr/sub 0.2/Ti/sub 0.8/O/sub 3/-SrRuO/sub 3/; ferroelectric field-effect transistor; ferroelectric insulator; memory effect; oxidic thin-film transistor; semiconductor channel; Dielectrics and electrical insulation; Ferroelectric materials; Hysteresis; Laboratories; Polarization; Pulsed laser deposition; Semiconductor thin films; Substrates; Thin film transistors; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Device Research Conference, 1996. Digest. 54th Annual
  • Conference_Location
    Santa Barbara, CA, USA
  • Print_ISBN
    0-7803-3358-6
  • Type

    conf

  • DOI
    10.1109/DRC.1996.546321
  • Filename
    546321