Coupled dynamics for micro electromechanical integrated electrostatic harmonic drive

A novel electromechanical integrated drive system actuated by electrostatic force is proposed, whose basic operating principle is also described. The dynamic performance of electrostatic force and the three axial mode functions are represented in Fourier series form. The differential equations for electromechanical coupled free vibration of the drive system are established on the basis of Donnell´s shell theory. Using the relationships between internal forces and displacements, the frequency equation is obtained for the clamped-free flexspline. Also, convergence of Fourier series is illustrated by a specific example. Changes of the coupled frequency along with main parameters are discussed. This investigation can be seen to show its great significance for further research on dynamic characteristic of the drive system.