5I-1 Microfabrication of Piezoelectric Composite Ultrasound Transducers (PC-MUT)

Author

Jiang, X. ; Yuan, J.R. ; Cheng, A. ; Snook, K. ; Cao, PJ ; Rehrig, P.W. ; Hackenberger, W.S. ; Lavalelle, G. ; Geng, X. ; Shrout, T.R.

Author_Institution

TRS Technol., Inc., State College, PA

fYear

2006

fDate

2-6 Oct. 2006

Firstpage

922

Lastpage

925

Abstract

In this paper a piezoelectric composite based micromachined ultrasound transducer (PC-MUT) fabrication technology is presented. PMN-PT single crystal posts with side length of 14 mum and height of > 60 mum were fabricated using a deep dry etching method. High frequency (20-50 MHz) PMN-PT single crystal/epoxy 1-3 composites were prepared and the electromechanical coupling coefficient of the composites was ~0.72. Prototype 40 MHz ultrasound transducers showed promising sensitivity and bandwidth

Keywords

composite materials; etching; micromachining; piezoelectric transducers; ultrasonic transducers; 20 to 50 MHz; PMN-PT single crystal; dry etching; electromechanical coupling coefficient; micromachining; piezoelectric composite micromachined ultrasound transducer; single crystal/epoxy 1-3 composites; transducers micro fabrication; Acoustic transducers; Ceramics; Costs; Fabrication; Frequency; Micromachining; Piezoelectric films; Piezoelectric transducers; Ultrasonic imaging; Ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2006. IEEE

Conference_Location

Vancouver, BC

ISSN

1051-0117

Print_ISBN

1-4244-0201-8

Electronic_ISBN

1051-0117

Type

conf

DOI

10.1109/ULTSYM.2006.246

Filename

4152102