• DocumentCode
    2353720
  • Title

    P1J-2 Electromechanical Coupling Coefficient k15 and Crystallites Alignment of (1120) Textured ZnO Films

  • Author

    Yanagitani, Takahiko ; Kiuchi, Masato ; Matsukawa, Mami ; Watanabe, Yoshiaki

  • Author_Institution
    Kansai collaboration center, National Inst. of Adv. Ind. Sci. & Technol., Osaka
  • fYear
    2006
  • fDate
    2-6 Oct. 2006
  • Firstpage
    1463
  • Lastpage
    1466
  • Abstract
    Pure-shear mode piezoelectric device applications require that the ZnO film where crystallites c-axis lie in the substrate plane and be unidirectionally aligned ((112macr0) textured ZnO films). This paper reports the relationship between degrees of crystallites alignment and shear mode electromechanical coupling coefficient k15 of the (112macr0) textured ZnO films
  • Keywords
    II-VI semiconductors; acoustic resonators; bulk acoustic wave devices; crystallites; electromechanical effects; piezoelectric thin films; wide band gap semiconductors; zinc compounds; (112macr0) textured ZnO film; RF magnetron sputtering; crystallites alignment; electromechanical coupling coefficient; film bulk acoustic resonator; pure-shear mode piezoelectric device; Anodes; Crystallization; Electrodes; Film bulk acoustic resonators; Piezoelectric films; Radio frequency; Silicon compounds; Sputtering; Substrates; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2006. IEEE
  • Conference_Location
    Vancouver, BC
  • ISSN
    1051-0117
  • Print_ISBN
    1-4244-0201-8
  • Electronic_ISBN
    1051-0117
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2006.368
  • Filename
    4152224
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2353720