• DocumentCode
    2355215
  • Title

    P2I-1 Surface Acoustic Wave Ultraviolet Sensor Using Epitaxial AlGaN/(Al,Ga)N Film

  • Author

    Koh, K. ; Nakai, K. ; Negisi, T. ; Yokota, M. ; Hohkawa, K.

  • Author_Institution
    Fac. of Eng., Kanagawa Inst. of Technol.
  • fYear
    2006
  • fDate
    2-6 Oct. 2006
  • Firstpage
    1774
  • Lastpage
    1777
  • Abstract
    In order to realize SAW ultraviolet sensor with short variable wavelength selectivity and high sensitivity, we study a SAW ultraviolet sensor using the AlGaN/(Al, Ga)N/Al2O3 system. When irradiating UV light on the surface of propagating path, the shift of frequency and change of insertion loss can be measured. Experimental results indicate that this sensor have good wavelength selectivity and could detect the weaker UV light power with several microwatt
  • Keywords
    semiconductor thin films; surface acoustic wave sensors; thin film sensors; ultraviolet detectors; AlGaN-(AlGa)N-Al2O3; SAW ultraviolet sensor; UV light irradiation; epitaxial AlGaN/(Al,Ga)N film; insertion loss; short variable wavelength selectivity; surface acoustic wave; Acoustic sensors; Acoustic waves; Aluminum gallium nitride; Frequency measurement; Insertion loss; Loss measurement; Optical propagation; Propagation losses; Sensor systems; Surface acoustic waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2006. IEEE
  • Conference_Location
    Vancouver, BC
  • ISSN
    1051-0117
  • Print_ISBN
    1-4244-0201-8
  • Electronic_ISBN
    1051-0117
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2006.446
  • Filename
    4152302
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2355215