• DocumentCode
    235587
  • Title

    Surface potential change with droplet formation and Cu watermark growth by electrochemical oxidation resulting therefrom

  • Author

    Shima, Shohei ; Hamada, Satomi ; Wada, Yasuhiro ; Fukunaga, Akira

  • Author_Institution
    Adv. Technol. Div., Ebara Corp., Fujisawa, Japan
  • fYear
    2014
  • fDate
    19-21 Nov. 2014
  • Firstpage
    87
  • Lastpage
    91
  • Abstract
    To reveal the mechanism of watermark formation on a Cu film, the Volta potential in a droplet area on Cu was evaluated using the scanning Kelvin-probe method. The droplet area on Cu exhibited an upward convex potential profile, indicating that the electrochemical reactions were more active in the areas around the droplet than at the center of the droplet. On the other hand, Si exhibited a profile converse to that of Cu: electrochemical reactions were more active at the center of the droplet area than in the areas around it. These evaluations revealed that the pinning and ring-shaped watermark formation at the droplet area on a Cu film resulted from the said Volta potential profile.
  • Keywords
    copper; drops; electrochemical analysis; oxidation; surface cleaning; surface potential; Cu; Cu film; Cu watermark growth; Volta potential profile; droplet formation; electrochemical oxidation; electrochemical reactions; pinning watermark formation; ring-shaped watermark formation; scanning Kelvin-probe method; surface potential change; Electric potential; Films; Kelvin; Probes; Silicon; Substrates; Watermarking;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Planarization/CMP Technology (ICPT), 2014 International Conference on
  • Conference_Location
    Kobe
  • Print_ISBN
    978-1-4799-5556-5
  • Type

    conf

  • DOI
    10.1109/ICPT.2014.7017253
  • Filename
    7017253