DocumentCode
2356934
Title
A new concept for high-voltage SOI devices
Author
Wondrak, W. ; Held, R. ; Stein, E. ; Korec, J.
Author_Institution
Daimler-Benz Research institute
fYear
1992
fDate
1992
Firstpage
278
Lastpage
281
Keywords
Bonding; Cathodes; Dielectric devices; Dielectric substrates; Doping; Fabrication; Isolation technology; Semiconductor films; Silicon on insulator technology; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Power Semiconductor Devices and ICs, 1992. ISPSD '92. Proceedings of the 4th International Symposium on
Type
conf
DOI
10.1109/ISPSD.1992.991286
Filename
991286
Link To Document