Development of radio-opaque silicon micro needles for medical diagnostics

Author

Ruiqi, Lim ; Su, Nandar ; Chandrappan, Jayakrishnan ; Tang Shao Qiang ; Vaidyanathan, Kripesh ; Nagarajan, Ranganathan

Author_Institution

Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore

fYear

2010

fDate

8-10 Dec. 2010

Firstpage

84

Lastpage

88

Abstract

In this paper, a method of fabricating radio opaque silicon micro needles for tissue labeling applications is reported. Cylindrical shaped micro needles ranging from 7 × 7 to 11 × 11 arrays with a pitch varying from 60 μm to 100μm are fabricated in silicon using a three step mask process. A backside cavity is generated under DRIE for filling the radiopaque material. Barium sulphate is filled in and a biocompatible sealing is provided to hold the radiopaque material inside. The fabricated needles provide a better contrast enhancement under x-ray imaging.

Keywords

biological tissues; biomedical equipment; biomedical materials; elemental semiconductors; needles; silicon; DRIE; Si; X-ray imaging; barium sulphate; biocompatible sealing; cylindrical shaped microneedles; medical diagnostics; radio-opaque silicon microneedles; radiopaque material; step mask process; tissue labeling applications;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronics Packaging Technology Conference (EPTC), 2010 12th

Conference_Location

Singapore

Print_ISBN

978-1-4244-8560-4

Electronic_ISBN

978-1-4244-8561-1

Type

conf

DOI

10.1109/EPTC.2010.5702611

Filename

5702611