• DocumentCode
    2357639
  • Title

    Physical insights on nanoscale FETs based on epitaxial graphene on SiC

  • Author

    Cheli, Martina ; Michetti, Paolo ; Iannaccone, Giuseppe

  • Author_Institution
    Dipt. di Ing. dell´´Inf., Elettron., Inf., Telecomun., Univ. di Pisa, Pisa, Italy
  • fYear
    2009
  • fDate
    14-18 Sept. 2009
  • Firstpage
    193
  • Lastpage
    196
  • Abstract
    Epitaxial graphene on SiC substrate is a promising channel material for FETs because it can possibly overcome two main problems of graphene-based devices: the fabrication process is suitable for large-volume manufacturing, and the material exhibits an appreciable semiconducting gap of 0.26 eV. We present an analytical model of a nanoscale FET based on epitaxial graphene on SiC, and assess the achievable performance in the case of fully ballistic transport. Our model also allows us to conduct an exploration of the design parameter space. We observe that the main aspect undermining the performance of graphene FETs on SiC is the still limited energy gap, that has two main consequences: on the one hand it allows band-to-band tunneling at the drain side when the device is in the off state, therefore limiting the achievable Ion/Ioff ratio; on the other hand the injection of holes in the channel, when the device is biased in subthreshold, increases the channel quantum capacitance and can severely degrade the subthreshold slope. We show that an Ion/Ioff ratio of 60 and a subthreshold slope of 150 mV/decade are obtained for a ballistic device without lateral confinement and for a supply voltage of 0.25 V. We also show that performance can be largely improved if accumulation of holes in the channel is inhibited or suppressed ( by allowing a limited degree of inelastic scattering) up to a very interesting Ion/Ioff ratio close to 104.
  • Keywords
    elemental semiconductors; energy gap; field effect transistors; graphene; nanoelectronics; silicon compounds; tunnelling; C-SiC; SiC substrate; ballistic device; ballistic transport; band-to-band tunneling; channel quantum capacitance; design parameter space; energy gap; epitaxial graphene; inelastic scattering; lateral confinement; nanoscale FET; off state; voltage 0.25 V to 0.26 V; Analytical models; Conducting materials; FETs; Fabrication; Manufacturing processes; Semiconductivity; Semiconductor device manufacture; Semiconductor materials; Silicon carbide; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid State Device Research Conference, 2009. ESSDERC '09. Proceedings of the European
  • Conference_Location
    Athens
  • ISSN
    1930-8876
  • Print_ISBN
    978-1-4244-4351-2
  • Electronic_ISBN
    1930-8876
  • Type

    conf

  • DOI
    10.1109/ESSDERC.2009.5331313
  • Filename
    5331313