P3R-3 Design and Characterization of Air Coupled Ultrasonic Transducers Based on MUMPs

Author

Octavio, A. ; Martin, C.J. ; Gomez-Ullate, Y. ; Martinez, Oscar ; Gomez-Ullate, L. ; Montero de Espinosa, F. ; Gatta, P. ; Dominguez, Manuel

Author_Institution

IA/IAI, Consejo Superior de Investigaciones Cientificas, Madrid

fYear

2006

fDate

2-6 Oct. 2006

Firstpage

2373

Lastpage

2376

Abstract

This paper deals with the design and characterization of several capacitive micromachined ultrasonic transducer (cMUT) cells for the future design of an air-coupled transducer for non destructive testing (NDT). Each design was manufactured using the multi-user MEMS process (MUMPs). Special boundary conditions were used to obtain high efficiency: two opposite sides of the 150 mum square shaped membranes are free while the other sides are anchored to a fixed layer of the process. Using these designs a large displacement of the membrane and a higher surface contact is obtained in spite of their mechanical losses

Keywords

micromachining; micromechanical devices; ultrasonic materials testing; ultrasonic transducers; 150 micron; MUMP; NDT; air coupled ultrasonic transducer characterization; air coupled ultrasonic transducer design; cMUT cells; capacitive micromachined ultrasonic transducer cells; mechanical losses; multiuser MEMS process; nondestructive testing; surface contact; Biomembranes; Boundary conditions; Electrodes; Gold; Manufacturing processes; Metallization; Micromechanical devices; Piezoelectric transducers; Silicon; Ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2006. IEEE

Conference_Location

Vancouver, BC

ISSN

1051-0117

Print_ISBN

1-4244-0201-8

Electronic_ISBN

1051-0117

Type

conf

DOI

10.1109/ULTSYM.2006.603

Filename

4152459