• DocumentCode
    2361624
  • Title

    A novel Love mode SAW sensor with ZnO layer operating in gas and liquid media

  • Author

    Kalantar-zadeh, Kourosh ; Chen, Yuen Yuen ; Fry, Benjamin N. ; Trinchi, Adrian ; Wlodarski, Wojtek

  • Author_Institution
    Sch. of Electr. & Comput. Eng, R. Melbourne Inst. of Technol., Vic., Australia
  • Volume
    1
  • fYear
    2001
  • fDate
    2001
  • Firstpage
    353
  • Abstract
    Novel layered Surface Acoustic Wave (SAW) sensors, based on a ZnO/90° rotated ST-cut quartz crystal structure, were fabricated. They were employed as gravimetric sensor´s for immunosensing applications and as SAW conductometric sensors for gas sensing applications. These sensors are able to sense oxygen gas concentrations as low as 0.2 ppm in nitrogen gas. Their mass detection limit in liquid media is as low as 100 pgr/cm2
  • Keywords
    Love waves; biosensors; chemical sensors; gas sensors; surface acoustic wave sensors; zinc compounds; Love mode SAW sensor; N2; O2; ZnO layer; ZnO-SiO2; conductometric sensor; gas sensor; gravimetric sensor; immunosensor; liquid sensor; mass detection; quartz crystal; Acoustic sensors; Acoustic waves; Chemical sensors; Frequency; Gas detectors; Sensor phenomena and characterization; Substrates; Surface acoustic wave devices; Surface acoustic waves; Zinc oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2001 IEEE
  • Conference_Location
    Atlanta, GA
  • Print_ISBN
    0-7803-7177-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2001.991640
  • Filename
    991640
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2361624