Electrically small and efficient on-chip MEMS antenna for biomedical devices

This paper presents a novel antenna solution for application of fully integrated and ultra-small wireless biomedical microdevices. Many implantable devices require very small dimensions, making use of microtechnologies to obtain the necessary size reduction. The proposed solution uses wafer level packaging to fully integrate the antenna whitin the microdevice, which is based on a MEMS structure to convert the incoming electromagnetic field to a voltage. It is proposed to use a cantilever, where an electroactive material is proposed as reading mechanism. This antenna allows the reception of signals in the MHz range and uses only a chip area of 1.5×1.5 mm², and a full system volume of 5×3×1.5 mm³.