Periodic arrays of transducers built using sand blasting and ultrasound micromachining techniques for the fabrication of piezocomposite materials

Author

Ballandras, S. ; Wilm, M. ; Gijs, M. ; Sayah, A. ; Andrey, E. ; Boy, J.-J. ; Robert, L. ; Baudouy, J.-C. ; Daniau, W. ; Laude, V.

Author_Institution

Lab. de Phys. et de Metrologies des Oscillateurs, Univ. de Franche-Comte, Besangon, France

Volume

2

fYear

2001

fDate

7-10 Oct. 2001

Firstpage

871

Abstract

Two technological approaches devoted to the collective manufacture of piezocomposite materials are investigated. Arrays of PZT pillars are built using sand blasting and ultrasound micromachining in order to manufacture 2-2 or 1-3 connectivity piezocomposites. Different structures built with both approaches are presented. Their efficiency is discussed in conclusion.

Keywords

composite materials; lead compounds; micromachining; piezoelectric transducers; ultrasonic machining; 1-3 connectivity; 2-2 connectivity; PZT pillars; periodic transducer arrays; piezocomposite materials; piezoelectric transducer elements; sand blasting; ultrasound micromachining techniques; Etching; Fabrication; Large-scale systems; Manufacturing processes; Micromachining; Piezoelectric transducers; Powders; Ultrasonic imaging; Ultrasonic transducer arrays; Ultrasonic transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2001 IEEE

Conference_Location

Atlanta, GA, USA

Print_ISBN

0-7803-7177-1

Type

conf

DOI

10.1109/ULTSYM.2001.991859

Filename

991859