Micromachined ultrasonic silicon/PZT transducer for underwater communications

Author

Siwapornsathain, Ekapon ; Lal, Amit

Author_Institution

Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA

Volume

2

fYear

2001

fDate

2001

Firstpage

945

Abstract

This paper presents design and experimental results on a miniature micromachined silicon sensor platform that includes an ultrasonic transmitter powered by miniature batteries. The transmitter consists of a Pierce oscillator formed with a silicon/PZT laminate transducer as the mechanical oscillator. FSK (frequency-shift-keying) transmission of digital data is accomplished by inductive switching in the Pierce oscillator. The device architecture allows for further miniaturization of underwater sensor systems

Keywords

digital communication; frequency shift keying; laminates; lead compounds; microactuators; microsensors; silicon; transmitters; ultrasonic transducers; underwater acoustic communication; FSK transmission; IC integratable feedback amplifier circuit; Pierce oscillator; Si-PZT; Si-PbZrO3TiO3; Si/PZT laminate transducer; digital data; electronic drive; frequency-shift-keying; inductive switching; mechanical oscillator; micromachined Si sensor platform; micromachined US Si/PZT transducer; miniature batteries; ultrasonic Si/PZT transducer; ultrasonic communications; ultrasonic transmitter; underwater communications; underwater sensor systems; Actuators; Batteries; Frequency; Laminates; Oscillators; Probes; Silicon; Transmitters; Ultrasonic transducers; Underwater communication;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 2001 IEEE

Conference_Location

Atlanta, GA

Print_ISBN

0-7803-7177-1

Type

conf

DOI

10.1109/ULTSYM.2001.991875

Filename

991875