DocumentCode
2366641
Title
Charged device model (CDM) metrology: limitations and problems
Author
Henry, Leo G. ; Hyatt, Hugh ; Barth, Jon ; Stevens, Michael ; Diep, Tom
Author_Institution
Adv. Micro Devices Inc., Sunnyvale, CA, USA
fYear
1996
fDate
10-12 Sept. 1996
Firstpage
167
Lastpage
179
Abstract
The inconsistent performance of various CDM test heads indicates severe metrology problems exist. Test head-to-test head response times vary by factors of two to three and no independent calibration method exists. CDM waveforms depend upon the total measurement system. This paper discusses the problems and methods necessary to the capture of believable CDM waveforms.
Keywords
calibration; electrostatic discharge; testing; CDM test head; ESD; calibration; charged device model metrology; measurement system; waveform capture; Calibration; Electrostatic discharges; Electrostatic measurements; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Overstress/Electrostatic Discharge Symposium, 1996. Proceedings
Print_ISBN
1-878303-69-4
Type
conf
DOI
10.1109/EOSESD.1996.865139
Filename
865139
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