New charged-plate monitor design offers greater flexibility

Charged-plate monitors are used to measure the effectiveness of air ionization systems throughout an ESD-sensitive device manufacturing process. Difficulty arises when one wishes to know what is occurring in a small space within that process. The conventional charged-plate monitor plate assembly is very bulky and many types cannot be remotely located from the instrument. A new technique for a charged-plate monitor is described. Design theory is presented and compared to conventional charged-plate monitor designs and advantages of the new design are discussed. Simplicity of design and flexibility in design and function are highlighted for this user-oriented system.