DocumentCode
2367168
Title
Electrostatic problems in TFT-LCD production and solutions using ionization
Author
Murakami, Toshio ; Togari, Haruyuki ; Steinman, Arnold
Author_Institution
Harada Corp., Tokyo, Japan
fYear
1996
fDate
10-12 Sept. 1996
Firstpage
365
Lastpage
370
Abstract
The liquid crystal display (LCD) has a multilayered structure combining insulating materials and electronic circuit devices. Many LCD production methods are accompanied by friction, movement, and separation of materials. It is difficult to avoid static charge generation and the resulting electrostatic problems of particle attraction and electrostatic discharge (ESD). This paper describes the problems caused by static charge in LCD manufacturing, and control measures using ionization.
Keywords
electronic equipment manufacture; electrostatic discharge; ionisation; liquid crystal displays; surface charging; thin film transistors; ESD; LCD manufacturing; TFT-LCD production; control measures; electronic circuit devices; electrostatic discharge; electrostatic problems; insulating materials; ionization; liquid crystal display; multilayered structure; particle attraction; static charge generation; Electronic equipment manufacture; Electrostatic discharges; Ionization; Liquid crystal displays; Surface charging; Thin film transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Overstress/Electrostatic Discharge Symposium, 1996. Proceedings
Print_ISBN
1-878303-69-4
Type
conf
DOI
10.1109/EOSESD.1996.865165
Filename
865165
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