TCAD: Present state and future challenges

Since the advent of computer modeling of semiconductor processes and devices in the 1970s, Technology Computer-Aided Design (TCAD) has been an integral part of technology development over the past four decades. Today, the use of TCAD has become widespread not only for “More Moore,” but also “More Than Moore” technologies (Fig. 1). As process and device complexity continues to rise, so does the complexity in technology modeling. This paper discusses the present state and future challenges of front-end process and device modeling.