Tunable Bandstop Resonator and Filter on Si-Substrate with PST Thin Film by Sol-Gel Deposition

Author

Chun, Young-Hoon ; Fragkiadakis, Charalampos ; Bao, Peng ; Lüker, Arne ; Wright, Robert V. ; Hong, Jia-Sheng ; Kirby, Paul B. ; Zhang, Qi ; Jackson, Timothy J. ; Lancaster, Michael J.

Author_Institution

Dept. of Electr., Heriot-Watt Univ. Riccarton, Edinburgh

fYear

2008

fDate

27-31 Oct. 2008

Firstpage

13

Lastpage

16

Abstract

Tunable bandstop resonators and filters are fabricated and measured. Lead strontium titanate (PST-Pb_0.4Sr_0.6(Ti_1-x Mn_x)O₃) thin film on a high-resistivity Si substrate is used for an application of low loss tunable circuits at microwave frequency band. Parallel plated PST varactors tune resonators and 3-pole bandstop filters which resonate at the center frequency of 4.23 and 7.1 GHz and its maximum rejection is more than 13.8 dB at the stop band while the insertion loss at the pass band is less than 3 dB.

Keywords

band-stop filters; microwave circuits; resonator filters; sol-gel processing; varactors; PST thin film; bandstop filter; sol-gel deposition; tunable bandstop resonator; Microwave circuits; Microwave frequencies; Resonator filters; Semiconductor thin films; Sputtering; Strontium; Substrates; Thin film circuits; Titanium compounds; Tunable circuits and devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2008. EuMC 2008. 38th European

Conference_Location

Amsterdam

Print_ISBN

978-2-87487-006-4

Type

conf

DOI

10.1109/EUMC.2008.4751374

Filename

4751374