DocumentCode
2373656
Title
Microelectronic transducer for heat-power engineering
Author
Lobach, Roman V. ; Lobach, Oleg V. ; Dikareva, Regina P.
Author_Institution
Novosibirsk State Tech. Univ., Novosibirsk
fYear
2008
fDate
1-5 July 2008
Firstpage
74
Lastpage
75
Abstract
In this paper is described of microsystem heat flux sensor principle of operation, is shown sensor construction and is presented its main parameters.
Keywords
microsensors; transducers; heat-power engineering; microelectronic transducer; microsensors; microsystem heat flux sensor; Battery charge measurement; Heat engines; Microelectronics; Power engineering; Resistors; Temperature sensors; Thermal force; Thermal resistance; Thermal sensors; Transducers; MEMS; heat flux sensor; microsystem technology; polysilicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials, 2008. EDM 2008. 9th International Workshop and Tutorials on
Conference_Location
Novosibirsk
ISSN
1815-3712
Print_ISBN
978-5-7782-0893-3
Type
conf
DOI
10.1109/SIBEDM.2008.4585871
Filename
4585871
Link To Document