Rigorous modeling of corrugated surfaces in microacoustics

The application of wave-number domain Green´s functions to acoustic wave propagation along nonflat surfaces is discussed. A boundary-element formulation of the mass loading effects in surface acoustic wave oscillators and resonators is presented. The method of analysis is based on the concept of periodic Green´s functions and the method of weighted residuals. A numerically calculated dispersion curve associated with a surface transverse wave in a periodic structure is also presented. The method discussed here is applicable to arbitrarily shaped electrode geometries as well as to arrays consisting of electrodes with materials differing from the substrate material