Deformation-sensitive cuts for surface acoustic waves in α-quartz

Author

Taziev, R.M. ; Kolosovsky, E.A. ; Kozlov, A.S.

Author_Institution

Inst. of Semicond. Phys., Acad. of Sci., Novosibirsk, Russia

fYear

1993

fDate

2-4 Jun 1993

Firstpage

660

Lastpage

664

Abstract

The influence of external static forces on SAW (surface acoustic wave) velocity is computed for circular plates (membranes). The pressure sensitivity of the SAW velocity as a function of α-quartz crystal anisotropy is studied by sensitivity contour mapping from two independent variables: direction of SAW propagation and cut angles of α-quartz. Theoretical sensitivity values are compared with experimental ones for circular (membrane) plates, and good agreement is found

Keywords

acoustic wave propagation; acoustic wave velocity; quartz; surface acoustic wave resonators; surface acoustic waves; α-quartz crystal anisotropy; SAW propagation; SAW resonator; SAW velocity; SiO₂; circular plates; cut angles; deformation sensitive cuts; external static forces; membranes; pressure sensitivity; sensitivity contour mapping; surface acoustic waves; Acoustic waves; Anisotropic magnetoresistance; Biomembranes; Equations; Solids; Stress; Surface acoustic wave devices; Surface acoustic waves; Surface waves; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium, 1993. 47th., Proceedings of the 1993 IEEE International

Conference_Location

Salt Lake City, UT

Print_ISBN

0-7803-0905-7

Type

conf

DOI

10.1109/FREQ.1993.367459

Filename

367459