2001 Microelectromechanical Systems Conference (Cat. No. 01EX521)

fYear

2001

fDate

24-26 Aug. 2001

Abstract

The following topics are dealt with: BioMEMS; packaging/assembly; RF MEMS; optics and MOEMS

Keywords

micromechanical devices; BioMEMS; MOEMS; RF MEMS; assembly; microelectromechanical system; optics; packaging;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectromechanical Systems Conference, 2001

Conference_Location

Berkeley, CA, USA

Print_ISBN

0-7803-7224-7

Type

conf

DOI

10.1109/MEMSC.2001.992726

Filename

992726

Link To Document