DocumentCode
2380931
Title
Survey of semiconductor process-induced damage
fYear
2002
fDate
2002
Firstpage
173
Lastpage
176
Keywords
Computer aided manufacturing; Design engineering; Integrated circuit layout; Integrated circuit manufacture; Integrated circuit reliability; Manufacturing processes; Plasma applications; Plasma devices; Plasma materials processing; Reliability engineering;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma- and Process-Induced Damage, 2002 7th International Symposium on
Print_ISBN
0-9651577-7-6
Type
conf
DOI
10.1109/PPID.2002.1042637
Filename
1042637
Link To Document