MSM photodetector with an integrated microlens array for improved optical coupling

Author

Ozelo, H.F.B. ; De Barros, L. E M ; Nabet, B. ; Neto, L.G. ; Romero, M.A. ; Swart, J.W.

Author_Institution

Lab. de Pesquisa em Dispositivos, Campinas Univ., Brazil

Volume

2

fYear

1999

fDate

1999

Firstpage

605

Abstract

We describe the fabrication of an array of integrated cylindrical microlenses on top of a single GaAs MSM photodetector. Preliminary experimental data already shows an increase of about 11% on the photocurrent of the MSM photodiode as a result of the improved optical coupling efficiency. However ray-tracing calculations indicate that this increase can reach values as high as 50% with a more careful lens design

Keywords

gallium arsenide; integrated optoelectronics; metal-semiconductor-metal structures; microlenses; optical arrays; photoconductivity; photodetectors; photodiodes; ray tracing; MSM photodetector; MSM photodiode; improved optical coupling efficiency; integrated cylindrical microlens fabrication; integrated microlens array; lens design; optical coupling; photocurrent; ray-tracing calculations; single GaAs MSM photodetector; Gallium arsenide; Lenses; Microoptics; Optical coupling; Optical design; Optical device fabrication; Photoconductivity; Photodetectors; Photodiodes; Ray tracing;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave and Optoelectronics Conference, 1999. SBMO/IEEE MTT-S, APS and LEOS - IMOC '99. International

Conference_Location

Rio de Janeiro

Print_ISBN

0-7803-5807-4

Type

conf

DOI

10.1109/IMOC.1999.866253

Filename

866253