A test structure for integrated capacitor array matching characterization

Author

Posch, Werner ; Promitzer, Gilbert ; Seebacher, Ehrenfried

Author_Institution

austriamicrosystems AG, Unterpremstaetten, Austria

fYear

2010

fDate

22-25 March 2010

Firstpage

152

Lastpage

157

Abstract

A novel characterization setup for integrated capacitor array mismatch determination is presented. The biasing of twenty capacitor units and the selection of a specific array are controlled by externally generated digital signals. Information about the spatial matching behavior is provided for an entire MIM capacitor array, where the relevant parameters are the standard deviations Â¿(Â¿C_i / C) and the offsets Â¿(Â¿C_i / C) of units i. Furthermore, the measurement repeatability is determined and an advanced derivation to consider the correlations introduced by the circuit structure and the extraction method is presented. The corresponding test chips were successfully realized in 0.35 um and 0.18 um standard CMOS technologies.

Keywords

CMOS integrated circuits; MIM devices; capacitors; CMOS technology; MIM capacitor array; capacitor unit biasing; circuit structure; digital signal; extraction method; integrated capacitor array matching characterization; integrated capacitor array mismatch determination; measurement repeatability; size 0.18 mum; size 0.35 mum; spatial matching behavior; standard deviation; test chip; test structure; CMOS technology; Capacitance-voltage characteristics; Circuit testing; Digital control; Integrated circuit interconnections; MIM capacitors; Microelectronics; Parasitic capacitance; Signal generators; Switches; DFM; capacitance array; capacitance matching; capacitance mismatch; floating gate; matching; unit capacitors;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronic Test Structures (ICMTS), 2010 IEEE International Conference on

Conference_Location

Hiroshima

Print_ISBN

978-1-4244-6912-3

Electronic_ISBN

978-1-4244-6914-7

Type

conf

DOI

10.1109/ICMTS.2010.5466833

Filename

5466833